Status LED chip manufacturing equipment and technology introduced
fecha:2011-06-07 15:41
estado:para resolver
pregunta:admin
untry with experience in the development of semiconductor PVD equipment, equipment manufacturers, will have the ability to achieve LED evaporation units domestically.
4, PECVD technology and equipment
PECVD process is completed after the epitaxial process, the chip surface coated with a layer of SiO2 or SiNx, as the electrode etching requires a hard mask in order to increase the mask and the GaN epitaxial layer etching selectivity, better moment eclipse profile morphology.
LED current mainstr
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