Status LED chip manufacturing equipment and technology introduced
fecha:2011-06-07 15:41
estado:para resolver
pregunta:admin
eam use of PECVD is generally flat with 13.56MHz PECVD, is about 250 ~ 300 ℃ in the temperature of film, a film can reach more than 40 films, PECVD is currently used in the production of domestic LED is still the main imports. LED using the same PECVD PECVD and traditional technical difficulties, the key technology is still in the temperature control, plasma technology, vacuum systems, software systems. China has successfully developed crystalline silicon solar cells with plate PECVD equipment,
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